Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method of the semiconductor memory device
-
Application No.: US16908362Application Date: 2020-06-22
-
Publication No.: US11751384B2Publication Date: 2023-09-05
- Inventor: Kang Sik Choi
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: WILLIAM PARK & ASSOCIATES LTD.
- Priority: KR 20190138550 2019.11.01
- Main IPC: H10B43/50
- IPC: H10B43/50 ; H10B41/50 ; H10B41/27 ; H01L23/528 ; G11C5/02 ; H10B43/27

Abstract:
A semiconductor memory device includes a first stack including lower conductive patterns separated from each other and stacked on a substrate to form a lower stepped structure, a support pillar passing through the first stack and including an insulating layer, a second stack including upper conductive patterns separated from each other and stacked on the first stack, the upper conductive patterns including an upper stepped structure that does not overlap with the lower stepped structure and the support pillar, a channel structure passing through the second stack and the first stack, and a memory layer surrounding a sidewall of the channel structure.
Public/Granted literature
- US20210134821A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD OF THE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-05-06
Information query