- Patent Title: Semiconductor memory device and method for manufacturing the same
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Application No.: US17716450Application Date: 2022-04-08
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Publication No.: US11751399B2Publication Date: 2023-09-05
- Inventor: Hiroki Tokuhira , Takahisa Kanemura , Shigeo Kondo , Michiru Hogyoku
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- The original application number of the division: US17028308 2020.09.22
- Main IPC: H10B43/35
- IPC: H10B43/35 ; H01L21/28 ; H10B43/27

Abstract:
A semiconductor memory device according to an embodiment includes a first stacked body, a second stacked body, an intermediate conductive layer, an intermediate insulating layer, a semiconductor pillar, a charge storage film, and an insulating film. The semiconductor pillar includes a first part, a second part, and a third part. The charge storage film includes a first charge storage portion and a second charge storage portion. The charge storage film includes at least one first element selected from the group consisting of nitrogen, hafnium, and aluminum. The insulating film provides in at least a portion between the intermediate conductive layer and the first part. The insulating film not includes the first element, or the insulating film has a concentration of the first element lower than a concentration of the first element of the charge storage film.
Public/Granted literature
- US20220231032A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-07-21
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