Invention Grant
- Patent Title: Method of manufacturing power generation element, power generation element, and power generation apparatus
-
Application No.: US16841703Application Date: 2020-04-07
-
Publication No.: US11751478B2Publication Date: 2023-09-05
- Inventor: Takamichi Fujii , Kenichi Umeda
- Applicant: FUJIFILM CORPORATION
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM CORPORATION
- Current Assignee: FUJIFILM CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: SOLARIS Intellectual Property Group, PLLC
- Priority: JP 17198384 2017.10.12
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H02N2/18 ; H10N30/088 ; H10N30/07 ; H10N30/30 ; H10N30/88 ; H10N30/87

Abstract:
A method of manufacturing a power generation element includes a first step of disposing a support unit that supports a vibration unit in one end portion of the vibration unit in one direction, and disposing a weight unit in the other end portion of the vibration unit in the one direction in a substrate including the vibration unit capable of vibrating, a second step of disposing a piezoelectric unit that generates power due to vibration in a portion of the vibration unit on an opposite side from the support unit side in a thickness direction of the substrate after the support unit and the weight unit are disposed in the vibration unit, and a third step of extracting a power generation element from the substrate by cutting an outer edge of the vibration unit in the thickness direction of the substrate after the piezoelectric unit is disposed in the vibration unit.
Public/Granted literature
Information query
IPC分类: