Invention Grant
- Patent Title: Imprint method, imprint apparatus, and method of manufacturing article
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Application No.: US17326694Application Date: 2021-05-21
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Publication No.: US11752670B2Publication Date: 2023-09-12
- Inventor: Yuji Sakata
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: ROSSI, KIMMS & McDOWELL LLP
- Priority: JP 20092542 2020.05.27
- Main IPC: B29C43/58
- IPC: B29C43/58 ; B29C59/00 ; G03F9/00 ; G03F7/00 ; B29C59/02

Abstract:
The present invention provides an imprint method of forming a pattern of an imprint material on a shot region of a substrate using a mold, the method comprising: supplying the imprint material onto the shot region so as to arrange droplets of the imprint material in arrangement patterns different from each other between a first partial region and a second partial region adjacent to each other in the shot region; performing alignment between the mold and the shot region after it is started to bring the mold and the imprint material into contact with each other; performing preliminary curing of irradiating the imprint material on the shot region with light to increase a viscoelasticity of the imprint material before the alignment is completed; and performing main curing of curing the imprint material on the shot region after the alignment is completed.
Public/Granted literature
- US20210370559A1 IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2021-12-02
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