Invention Grant
- Patent Title: Slurry analysis system using flow restriction
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Application No.: US17031328Application Date: 2020-09-24
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Publication No.: US11753914B2Publication Date: 2023-09-12
- Inventor: Takashi Nagata , Ting-Chien Teng , Kiyoshi Nozaki , Yohei Konishi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: ROEDER & BRODER LLP
- Agent Steven G. Roeder
- Main IPC: E21B43/12
- IPC: E21B43/12 ; E21B43/25 ; E21B47/06 ; B01D46/44 ; G01N11/04 ; G01N15/02 ; G01N15/06

Abstract:
A slurry analysis system (14) for estimating a first characteristic of a slurry (12) having a plurality of particles (18) suspended in a dispersion medium (20) can include a flow restriction assembly (40); a sensor assembly (43) that senses a sensed condition of the slurry (12) as it flows through the flow restriction assembly (40); and a control and analysis system (26) that estimates the first characteristic of the slurry (12) based on the sensed condition. Further, the control and analysis system (26) can select a selected clogging behavior using the sensed condition, and estimate the first characteristic based on the selected clogging behavior.
Public/Granted literature
- US20210087912A1 SLURRY ANALYSIS SYSTEM USING FLOW RESTRICTION Public/Granted day:2021-03-25
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