Invention Grant
- Patent Title: Thermal acid generator and resist composition using same
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Application No.: US17691718Application Date: 2022-03-10
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Publication No.: US11754920B2Publication Date: 2023-09-12
- Inventor: Junya Miyake , Yoshitomo Takeuchi , Naomi Sato , Kentaro Kimura
- Applicant: ADEKA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADEKA CORPORATION
- Current Assignee: ADEKA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP 16012814 2016.01.26
- The original application number of the division: US16071397
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07D221/14

Abstract:
A thermal acid generator having a high acid generation temperature, and a resist composition using the same. The thermal acid generator is a sulfonic acid derivative compound represented by the following Formula (I): (wherein, R1 represents an aliphatic hydrocarbon group having 1 to 18 carbon atoms or the like, or a group represented by the following Formula (II): (wherein, Y1 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms; R11 and R12 each independently represent an alkanediyl group having 2 to 6 carbon atoms, or the like; R13 represents a linear or branched alkyl group having 1 to 18 carbon atoms, or the like; a and b each represent 0 or 1; and either a or b is 1); R2 to R7 each independently represent a linear or branched alkyl group having 1 to 14 carbon atoms; the aliphatic hydrocarbon group or the like of R1 has no substituent or is substituted with a halogen atom or the like; and a methylene structure in the aliphatic hydrocarbon group or the like of R1 is optionally substituted with —O— or the like).
Public/Granted literature
- US20220197136A1 THERMAL ACID GENERATOR AND RESIST COMPOSITION USING SAME Public/Granted day:2022-06-23
Information query
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