Invention Grant
- Patent Title: Multi-component kernels for vector optical image simulation
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Application No.: US17873139Application Date: 2022-07-26
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Publication No.: US11754930B2Publication Date: 2023-09-12
- Inventor: Kenneth Lik Kin Ho , Chien-Jen Lai , Kenji Yamazoe , Xin Zhou , Danping Peng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00

Abstract:
A method of enhancing a layout pattern includes determining a vector transmission cross coefficient (vector-TCC) operator of an optical system of a lithographic system based on an illumination source of the optical system and an exit pupil of the optical system of the lithographic system. The method also includes performing an optical proximity correction (OPC) operation of a layout pattern of a photo mask to generate an OPC corrected layout pattern. The OPC operation uses the vector-TCC operator to determine a projected pattern of the layout pattern of the photo mask on a wafer. The method includes producing the OPC corrected layout pattern on a mask blank to create a photo mask.
Public/Granted literature
- US20220390854A1 MULTI-COMPONENT KERNELS FOR VECTOR OPTICAL IMAGE SIMULATION Public/Granted day:2022-12-08
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