Invention Grant
- Patent Title: Pattern grouping method based on machine learning
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Application No.: US16508167Application Date: 2019-07-10
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Publication No.: US11756182B2Publication Date: 2023-09-12
- Inventor: Wei Fang , Zhaohui Guo , Ruoyu Zhu , Chuan Li
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06F18/24

Abstract:
A pattern grouping method may include receiving an image of a first pattern, generating a first fixed-dimensional feature vector using trained model parameters applying to the received image, and assigning the first fixed-dimensional feature vector a first bucket ID. The method may further include creating a new bucket ID for the first fixed-dimensional feature vector in response to determining that the first pattern does not belong to one of a plurality of buckets corresponding to defect patterns, or mapping the first fixed-dimensional feature vector to the first bucket ID in response to determining that the first pattern belongs to one of a plurality of buckets corresponding to defect patterns.
Public/Granted literature
- US20200020092A1 PATTERN GROUPING METHOD BASED ON MACHINE LEARNING Public/Granted day:2020-01-16
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