Invention Grant
- Patent Title: Determining a critical dimension variation of a pattern
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Application No.: US17694131Application Date: 2022-03-14
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Publication No.: US11756188B2Publication Date: 2023-09-12
- Inventor: Vadim Vereschagin , Roman Kris , Ishai Schwarzband , Boaz Cohen , Evgeny Bal , Ariel Shkalim
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06T7/13
- IPC: G06T7/13 ; G06T7/60 ; G06T7/00

Abstract:
Input data may be received. The input data may include an image of a pattern and location data that identifies a modified portion of the pattern. A processing device may determine a first parameter of a first dimension within the pattern and a second parameter of a second dimension outside of the pattern. A combined set may be generated based on the first parameter and the second parameter. A defect associated with the modified portion may be classified based on the combined set.
Public/Granted literature
- US20220198639A1 DETERMINING A CRITICAL DIMENSION VARIATION OF A PATTERN Public/Granted day:2022-06-23
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