Invention Grant
- Patent Title: Transition structures for three-dimensional memory arrays
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Application No.: US17752332Application Date: 2022-05-24
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Publication No.: US11756596B1Publication Date: 2023-09-12
- Inventor: Shuangqiang Luo , Indra V. Chary , Lifang Xu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: G11C7/18
- IPC: G11C7/18 ; G11C7/10 ; H01L25/065 ; H01L23/48 ; H10B99/00

Abstract:
Methods, systems, and devices for transition structures for three-dimensional memory arrays are described. A memory device may include a staircase region which includes a set of vias. The set of vias may include a first subset of vias which couple respective word line plates of the memory region with associated word line decoders, and a second subset of vias which are electrically isolated from the word line plates. The second subset of vias may be arranged in one or more rows positioned between the first subset of vias and the memory region. In some cases, the second subset of vias may be positioned above respective conductive contacts. Additionally or alternatively, the second subset of vias may be positioned above a common conductor shared with pillars of the memory region.
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