Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17220982Application Date: 2021-04-02
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Publication No.: US11756769B2Publication Date: 2023-09-12
- Inventor: Takashi Tohara , Naokazu Furuya , Yosuke Tamuro , Yuzuru Sakai
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: WEIHROUCH IP
- Priority: JP 20067287 2020.04.03
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus includes: a chamber accommodating a plurality of substrates; a plurality of substrate supports provided inside the chamber and configured to support a substrate; a plurality of radio-frequency power sources provided corresponding to the plurality of substrate supports, and configured to supply radio-frequency power to the plurality of substrate supports, respectively; and a plurality of shields configured to compart the inside of the chamber and provided corresponding to the plurality of substrate supports to define a processing space where plasma is generated. A radio-frequency current path is formed between the plurality of shields so as not to interfere with one another.
Public/Granted literature
- US20210313151A1 PLASMA PROCESSING APPARATUS Public/Granted day:2021-10-07
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