Invention Grant
- Patent Title: Methods and systems of forming metal interconnect layers using engineered templates
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Application No.: US17219250Application Date: 2021-03-31
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Publication No.: US11756800B2Publication Date: 2023-09-12
- Inventor: Rashid Mavliev
- Applicant: Rashid Mavliev
- Applicant Address: US CA Campbell
- Assignee: Rashid Mavliev
- Current Assignee: Rashid Mavliev
- Current Assignee Address: US CA Campbell
- Agency: Polygon IP, LLP
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L23/528 ; H05K3/10 ; H05K3/24 ; H01L21/683 ; C25D17/00 ; C25D5/02 ; B29C33/42 ; H05K3/06 ; C25D7/06

Abstract:
Described herein are methods and systems for forming metal interconnect layers (MILs) on engineered templates and transferring these MILs to device substrates. This “off-device” approach of forming MILs reduces the complexity and costs of the overall process, allows using semiconductor processes, and reduces the risk of damaging the device substrates. An engineered template is specially configured to release a MIL when the MIL is transferred to a device substrate. In some examples, the engineered template does not include barrier layers and/or adhesion layers. In some examples, the engineered template comprises a conductive portion to assist with selective electroplating. Furthermore, the same engineered template may be reused to form multiple MILs, having the same design. During the transfer, the engineered template and device substrate are stacked together and then separated while the MIL is transitioned from the engineered template to the device substrate.
Public/Granted literature
- US20210305061A1 METHODS AND SYSTEMS OF FORMING METAL INTERCONNECT LAYERS USING ENGINEERED TEMPLATES Public/Granted day:2021-09-30
Information query
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