Invention Grant
- Patent Title: Substrate treating apparatus
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Application No.: US17476890Application Date: 2021-09-16
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Publication No.: US11756813B2Publication Date: 2023-09-12
- Inventor: Yong Seok Jang , In Kyu Park
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20200121436 2020.09.21
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/68 ; H01L21/673

Abstract:
Disclosed is a substrate treating apparatus. The substrate treating apparatus includes an index unit including a load pot, in which a container is seated, and an index chamber connected to the load pot, and a process executing unit having a load lock chamber connected to the index chamber and a process chamber that treats a substrate transferred to the load lock chamber, the index unit further includes an alignment unit provided in the index chamber and that aligns a substrate type sensor transferred to the process chamber.
Public/Granted literature
- US20220093427A1 SUBSTRATE TREATING APPARATUS Public/Granted day:2022-03-24
Information query
IPC分类: