Invention Grant
- Patent Title: Ferroelectric tunnel junction devices with discontinuous seed structure and methods for forming the same
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Application No.: US17230477Application Date: 2021-04-14
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Publication No.: US11756987B2Publication Date: 2023-09-12
- Inventor: Han-Jong Chia , Mauricio Manfrini
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/78 ; H01L29/66 ; H01L29/786 ; H01L21/28 ; H10B53/30 ; H01L21/02 ; H01L49/02

Abstract:
A memory device, transistor, and methods of making the same, the memory device including a memory cell including: a bottom electrode layer; a high-k dielectric layer disposed on the bottom electrode layer; a discontinuous seed structure comprising discrete particles of a metal disposed on the high-k dielectric layer; a ferroelectric (FE) layer disposed on the seed structure and directly contacting portions of high-k dielectric layer exposed through the seed structure; and a top electrode layer disposed on the FE layer.
Public/Granted literature
- US20210408223A1 FERROELECTRIC TUNNEL JUNCTION DEVICES WITH DISCONTINUOUS SEED STRUCTURE AND METHODS FOR FORMING THE SAME Public/Granted day:2021-12-30
Information query
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