Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
-
Application No.: US17972100Application Date: 2022-10-24
-
Publication No.: US11757033B2Publication Date: 2023-09-12
- Inventor: Kengo Omori
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: XSENSUS LLP
- Priority: JP 11183041 2011.08.24 JP 11211443 2011.09.27 JP 12132261 2012.06.11
- The original application number of the division: US13590665 2012.08.21
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L21/8234 ; H01L21/265 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/10

Abstract:
A wide band gap semiconductor device includes a semiconductor layer, a trench formed in the semiconductor layer, first, second, and third regions having particular conductivity types and defining sides of the trench, and a first electrode embedded inside an insulating film in the trench. The second region integrally includes a first portion arranged closer to a first surface of the semiconductor layer than to a bottom surface of the trench, and a second portion projecting from the first portion toward a second surface of the semiconductor layer to a depth below a bottom surface of the trench. The second portion of the second region defines a boundary surface with the third region, the boundary region being at an incline with respect to the first surface of the semiconductor layer.
Public/Granted literature
- US20230044680A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2023-02-09
Information query
IPC分类: