Invention Grant
- Patent Title: Semiconductor light receiving element with mesa type photodiode structure
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Application No.: US17188335Application Date: 2021-03-01
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Publication No.: US11757052B2Publication Date: 2023-09-12
- Inventor: Yoshihiro Yoneda , Koji Ebihara , Takuya Okimoto
- Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- Applicant Address: JP Kanagawa
- Assignee: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- Current Assignee: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- Current Assignee Address: JP Kanagawa
- Agency: SMITH, GAMBRELL & RUSSELL, LLP.
- Priority: JP 20035037 2020.03.02
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L31/0304 ; H01L31/0352 ; H01L31/109

Abstract:
A semiconductor light receiving element includes a first semiconductor layer, a waveguide type photodiode structure, an optical waveguide structure, and a fourth semiconductor layer. The waveguide type photodiode structure is provided on the first semiconductor layer. The waveguide type photodiode structure includes an optical absorption layer, a second semiconductor layer, a multiplication layer, and a third semiconductor layer. The optical waveguide structure is provided on the first semiconductor layer. The optical waveguide structure includes an optical waveguiding core layer and a cladding layer. An end face of the waveguide type photodiode structure faces to an end face of the optical waveguide structure. The fourth semiconductor layer is located between the end face of the waveguide type photodiode structure and the end face of the optical waveguide structure. The fourth semiconductor layer contacts the multiplication layer at the end face of the waveguide type photodiode structure.
Public/Granted literature
- US20210273121A1 SEMICONDUCTOR LIGHT RECEIVING ELEMENT Public/Granted day:2021-09-02
Information query
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