Invention Grant
- Patent Title: Electromagnetic wave detector, and electromagnetic wave detector array
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Application No.: US16980437Application Date: 2019-02-28
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Publication No.: US11757055B2Publication Date: 2023-09-12
- Inventor: Shoichiro Fukushima , Masaaki Shimatani , Shimpei Ogawa
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP 18121156 2018.06.26
- International Application: PCT/JP2019/007781 2019.02.28
- International Announcement: WO2020/003613A 2020.01.02
- Date entered country: 2020-09-14
- Main IPC: H01L31/032
- IPC: H01L31/032 ; G01J1/02 ; H01L31/0384

Abstract:
An electromagnetic wave detector 100 comprises: a substrate 5 having a front surface and a back surface; an insulating layer 4 formed of a rare earth oxide, which is provided on the front surface of the substrate 5; a pair of electrodes 2 provided on the insulating layer 4 so as to be arranged to face each other across a gap; and a two-dimensional material layer 1 provided on the insulating layer 4 so as to be electrically connected to the pair of electrodes 2. The rare earth oxide contains a base material made of an oxide of a first rare earth element, and a second rare earth element different from the first rare earth element, which is activated in the base material.
Public/Granted literature
- US20210020797A1 ELECTROMAGNETIC WAVE DETECTOR, AND ELECTROMAGNETIC WAVE DETECTOR ARRAY Public/Granted day:2021-01-21
Information query
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