Invention Grant
- Patent Title: Dimension control for raised lines
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Application No.: US17466645Application Date: 2021-09-03
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Publication No.: US11758741B2Publication Date: 2023-09-12
- Inventor: Ahmed Nayaz Noemaun
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- The original application number of the division: US16298299 2019.03.11
- Main IPC: H10B63/00
- IPC: H10B63/00 ; H10B53/20 ; H10B53/30 ; H10N70/00 ; H10N70/20

Abstract:
Methods, systems, and devices for dimension control for raised lines are described. For example, the techniques described herein may be used to fabricate raised lines (e.g., orthogonal raised lines). The lines may be fabricated such that an overall area of each line is consistent. In some examples, the techniques may be applied to form memory cells across multiple memory tiles, multiple memory arrays, and/or multiple wafers such that each memory cell comprises a consistent overall area. To form the lines and/or memory cells, a material associated with a desired properties may be deposited after performing a first cut. Due to the properties associated with the material, a width of the second cut may be affected, thus resulting in more uniform lines and/memory cells.
Public/Granted literature
- US20220059614A1 DIMENSION CONTROL FOR RAISED LINES Public/Granted day:2022-02-24
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