Invention Grant
- Patent Title: Fluid control device
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Application No.: US17804858Application Date: 2022-06-01
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Publication No.: US11761439B2Publication Date: 2023-09-19
- Inventor: Nobuhira Tanaka
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Pearne & Gordon LLP
- Priority: JP 18102092 2018.05.29
- Main IPC: F04B45/047
- IPC: F04B45/047 ; F04D33/00 ; F04B45/04

Abstract:
A fluid control device includes: a case that includes a case top plate having a first vent hole, a case side plate, and a case bottom plate having a second vent hole; a pump body; and a holding member that holds the pump body relative to the case. The pump body includes a first main plate, a second main plate that faces one main surface of the first main plate, a side plate, and a driving member that is arranged on the first main plate. The first main plate includes a plurality of first openings arranged in a ring shape. The second main plate is arranged at a side of the first main plate nearer the case top plate and has a second opening at a position that overlaps the first vent hole in a plan view.
Public/Granted literature
- US20220290664A1 FLUID CONTROL DEVICE Public/Granted day:2022-09-15
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