Fluid actuator, fluid actuator control method, and computer readable medium storing control program of fluid actuator
Abstract:
Provided is a fluid actuator capable of safely driving a drive target. An air actuator using air as a working fluid includes an X-axis pressure sensor that measures air pressures PX+ and PX− along one drive axis, which drives a drive target in an X direction, a Y-axis pressure sensor that measures air pressures PY1+, PY1−, PY2+, and PY2− along two drive axes, which drive the drive target in a Y direction, and an acceleration detection unit that detects translational acceleration and rotational acceleration generated in the drive target on the basis of the measured air pressures PX+, PX−, PY1+, PY1−, PY2+, and PY2−.
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