Invention Grant
- Patent Title: Concentration estimation method
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Application No.: US17094621Application Date: 2020-11-10
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Publication No.: US11761920B2Publication Date: 2023-09-19
- Inventor: Abygael Viey , Marie-Anne Jaud , William Vandendaele
- Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee Address: FR Paris
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR 13213 2019.11.26
- Main IPC: G01N27/22
- IPC: G01N27/22 ; G01N27/00 ; H01L29/20 ; H01L29/51 ; H01L29/778 ; H01L29/94

Abstract:
A method of estimating a nitrogen site carbon concentration, in a first epitaxial layer made of carbon-doped gallium nitride of an electronic component, including steps of: estimating an electric capacitance of a stack interposed between the first layer and a first electrode of the component; heating the component; measuring an offset of a threshold voltage of the component; and deducing therefrom a nitrogen site carbon surface concentration in the first layer.
Public/Granted literature
- US20210156812A1 CONCENTRATION ESTIMATION METHOD Public/Granted day:2021-05-27
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