Invention Grant
- Patent Title: Photoresist composition, method for preparing the same, and patterning method
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Application No.: US16940615Application Date: 2020-07-28
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Publication No.: US11762290B2Publication Date: 2023-09-19
- Inventor: Teng Zhang , Kejun Lu , Daeyoun Park , Fanhua Hu
- Applicant: Beijing Asahi Electronic Materials Co., Ltd
- Applicant Address: CN Beijing
- Assignee: Beijing Asahi Electronic Materials Co., Ltd
- Current Assignee: Beijing Asahi Electronic Materials Co., Ltd
- Current Assignee Address: CN Beijing
- Agency: McCoy Russell LLP
- Priority: CN 1910933465.5 2019.09.29
- Main IPC: G03F7/023
- IPC: G03F7/023 ; G03F7/30 ; G03F7/004 ; G03F7/11 ; G03F7/34 ; G03F7/32 ; G03F7/022 ; G03F7/36 ; G03F7/38 ; G03F7/40

Abstract:
The present disclosure relates to a photoresist composition, a method for preparing the same, and a patterning method. The photoresist composition includes: 1 wt % to 10 wt % of a photosensitizer; 10 wt % to 20 wt % of a phenolic resin; 0.1 wt % to 5.5 wt % of an additive; and 75 wt % to 88 wt % of a solvent, based on the total weight of the photoresist composition, in which the photosensitizer includes: 20 wt % to 70 wt % of a first photosensitive compound represented by formula (1), 20 wt % to 70 wt % of a second photosensitive compound represented by formula (2), and 1 wt % to 35 wt % of a third photosensitive compound represented by formula (3), based on the total weight of the photosensitizer. The photoresist composition of the present disclosure simultaneously guarantees high resolution and high sensitivity, and can meet actual production requirements.
Public/Granted literature
- US20210096463A1 PHOTORESIST COMPOSITION, METHOD FOR PREPARING THE SAME, AND PATTERNING METHOD Public/Granted day:2021-04-01
Information query
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