Invention Grant
- Patent Title: Method for preparing semiconductor die structure with air gaps
-
Application No.: US17517539Application Date: 2021-11-02
-
Publication No.: US11764108B2Publication Date: 2023-09-19
- Inventor: Pei-Cheng Fan
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agent Xuan Zhang
- The original application number of the division: US16855601 2020.04.22
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532

Abstract:
The present disclosure provides a method for preparing a semiconductor die structure with air gaps for reducing capacitive coupling between conductive features and a method for preparing the semiconductor die structure. The method includes: forming a first supporting backbone on the substrate; forming a first conductor block on the first supporting backbone; forming a second supporting backbone on the substrate; forming a second conductor block on the second supporting backbone; forming a third conductor block suspended above the substrate and connected to the first conductor block and the second conductor block; sequentially forming an energy removable layer and a capping dielectric layer over the substrate, and the energy removable layer and the capping dielectric layer separating the first conductor block, the second conductor block and the third conductor block; and performing a heat treatment process to transform the energy removable layer into a plurality of air gap structures.
Public/Granted literature
- US20220059399A1 METHOD FOR PREPARING SEMICONDUCTOR DIE STUCTURE WITH AIR GAPS Public/Granted day:2022-02-24
Information query
IPC分类: