Invention Grant
- Patent Title: Method of forming shield structure for backside through substrate vias (TSVS)
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Application No.: US17355534Application Date: 2021-06-23
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Publication No.: US11764129B2Publication Date: 2023-09-19
- Inventor: Min-Feng Kao , Dun-Nian Yaung , Hsing-Chih Lin , Jen-Cheng Liu , Wei-Tao Tsai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16553222 2019.08.28
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L23/48 ; H01L25/065 ; H01L21/762 ; H01L25/00 ; H01L27/02 ; H01L21/3065 ; H01L21/761 ; H01L21/768 ; H01L23/60 ; H01L23/528 ; H01L29/66 ; H01L23/00 ; H01L29/06 ; H01L29/78 ; H01L23/522

Abstract:
Various embodiments of the present application are directed towards an integrated circuit (IC) in which a shield structure blocks the migration of charge to a semiconductor device from proximate a through substrate via (TSV). In some embodiments, the IC comprises a substrate, an interconnect structure, the semiconductor device, the TSV, and the shield structure. The interconnect structure is on a frontside of the substrate and comprises a wire. The semiconductor device is on the frontside of the substrate, between the substrate and the interconnect structure. The TSV extends completely through the substrate, from a backside of the substrate to the wire, and comprises metal. The shield structure comprises a PN junction extending completely through the substrate and directly between the semiconductor device and the TSV.
Public/Granted literature
- US20210320052A1 SHIELD STRUCTURE FOR BACKSIDE THROUGH SUBSTRATE VIAS (TSVS) Public/Granted day:2021-10-14
Information query
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