Invention Grant
- Patent Title: Vertical-cavity surface-emitting laser
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Application No.: US17878032Application Date: 2022-07-31
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Publication No.: US11764545B2Publication Date: 2023-09-19
- Inventor: Ki Hwang Lee , Jeong Rae Ro , Byueng Su Yoo , Yoon Sang Jeon , Gong Hee Choi
- Applicant: SEOUL VIOSYS CO., LTD.
- Applicant Address: KR Ansan-si
- Assignee: Seoul Viosys Co., Ltd.
- Current Assignee: Seoul Viosys Co., Ltd.
- Current Assignee Address: KR Ansan-si
- Agency: H.C. Park & Associates, PLC
- Main IPC: H01S5/183
- IPC: H01S5/183 ; H01S5/42 ; H01S5/042

Abstract:
A vertical-cavity surface-emitting laser (VCSEL) including a substrate including a plurality of emitters forming an array region, a lower mirror, an upper mirror, an active layer interposed between the lower mirror and the upper mirror, an aperture forming layer interposed between the upper mirror and the active layer and including an oxidation region and a window region, a connector disposed on the upper mirror, a plurality of oxidation holes passing through the upper mirror and the aperture forming layer, an upper insulation layer covering the plurality of oxidation holes, and a pad electrically connected to the connector, in which at least a portion of the connector is disposed in the plurality of oxidation holes, the plurality of emitters is disposed in substantially a honeycomb shape on the substrate, and the pad is formed on one side of the substrate adjacent to the array region.
Public/Granted literature
- US20220368106A1 VERTICAL-CAVITY SURFACE-EMITTING LASER Public/Granted day:2022-11-17
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