Invention Grant
- Patent Title: Phase-modified quasi-non-diffracting laser beams for high angle laser processing of transparent workpieces
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Application No.: US16871617Application Date: 2020-05-11
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Publication No.: US11766746B2Publication Date: 2023-09-26
- Inventor: Viacheslav Viacheslavovich Ivanov , Nikolay Alekseyevich Kaliteevskiy , Nickolaos Savidis , Petr Mikhaylovich Sterlingov , Ralf Joachim Terbrueggen , Craig John Mancusi Ungaro
- Applicant: CORNING INCORPORATED
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Kevin L. Bray
- Main IPC: B23K26/38
- IPC: B23K26/38 ; B23K26/359 ; B23K26/073
Abstract:
A method for processing a transparent workpiece that includes directing a laser beam the transparent workpiece. The laser beam incident to the impingement surface has an oblong angular spectrum and portion of the laser beam directed into the transparent workpiece is a laser beam focal line and generates an induced absorption to produce a defect within the transparent workpiece. The laser beam focal line includes a wavelength λ, a spot size wo, a Rayleigh range ZR that is greater than
F
D
π
w
o
2
λ
,
where FD is a dimensionless divergence factor comprising a value of 10 or greater, and an internal beam angle of greater than 10° relative to a plane orthogonal to an impingement surface at an impingement location, such that the defect has a defect angle within the transparent workpiece of greater than 10° relative to a plane orthogonal to the impingement surface at the impingement location.
F
D
π
w
o
2
λ
,
where FD is a dimensionless divergence factor comprising a value of 10 or greater, and an internal beam angle of greater than 10° relative to a plane orthogonal to an impingement surface at an impingement location, such that the defect has a defect angle within the transparent workpiece of greater than 10° relative to a plane orthogonal to the impingement surface at the impingement location.
Information query
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