Invention Grant
- Patent Title: Processing system, measuring probe, shape measuring device, and program
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Application No.: US16957176Application Date: 2017-12-25
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Publication No.: US11766757B2Publication Date: 2023-09-26
- Inventor: Tomoaki Yamada , Shizuo Nishikawa , Satoshi Miyamoto , Junichi Morishita
- Applicant: NIKON CORPORATION , DMG MORI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION,DMG MORI CO., LTD.
- Current Assignee: NIKON CORPORATION,DMG MORI CO., LTD.
- Current Assignee Address: JP Tokyo; JP Yamatokoriyama
- Agency: Oliff PLC
- International Application: PCT/JP2017/046371 2017.12.25
- International Announcement: WO2019/130381A 2019.07.04
- Date entered country: 2020-09-15
- Main IPC: B23Q17/20
- IPC: B23Q17/20 ; G01B11/00 ; G05B19/401

Abstract:
A processing system includes a control unit that generates positional information related to a position of a measuring unit at a time of measuring a processing object and outputs the generated positional information and a generation period signal indicating a period during which the positional information is generated, an acquisition unit that acquires the positional information and the generation period signal which have been output, an acquisition interval calculation unit that calculates a statistical value indicating an interval between acquisition periods regarding a plurality of generation period signals acquired by the acquisition unit, an estimation unit that estimates the period during which the positional information is generated on the basis of the statistical value calculated by the acquisition interval calculation unit, and a shape calculation unit that calculates a shape of the processing object based on measurement information, the positional information, and the period estimated by the estimation unit.
Public/Granted literature
- US20210069847A1 PROCESSING SYSTEM, MEASUREMENT PROBE, SHAPE MEASUREMENT DEVICE, AND PROGRAM Public/Granted day:2021-03-11
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