Invention Grant
- Patent Title: Calibration of an electronics processing system
-
Application No.: US16861000Application Date: 2020-04-28
-
Publication No.: US11766782B2Publication Date: 2023-09-26
- Inventor: Nicholas Michael Bergantz , Damon K. Cox , Alexander Berger
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B25J9/16
- IPC: B25J9/16 ; H01L21/67 ; H01L21/677 ; H01L21/687 ; B65G47/90 ; H01L21/68 ; B25J11/00 ; B25J13/08

Abstract:
A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.
Public/Granted literature
- US20210291375A1 CALIBRATION OF AN ELECTRONICS PROCESSING SYSTEM Public/Granted day:2021-09-23
Information query
IPC分类: