Invention Grant
- Patent Title: Apparatus for thermal control of tubing assembly and associated methods
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Application No.: US16818990Application Date: 2020-03-13
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Publication No.: US11768011B2Publication Date: 2023-09-26
- Inventor: Karl F. Leeser
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: F24H1/10
- IPC: F24H1/10 ; F28F13/18 ; F24H3/00 ; H05B3/56 ; H01L21/67 ; H01L21/687 ; H01L21/677 ; H01J37/32 ; F24H3/08 ; F28F13/00

Abstract:
Tubing structures are connected to each other to form a tubing assembly having one or more fluid pathways from a fluid entrance to a fluid exit. A heating device is bonded to the tubing structures along a length of the tubing assembly. The heating device has a flexibility to follow along one or more bends present along the length of the tubing assembly. The heating device includes one or more heater traces embedded within an encasing material. The encasing material is thermally conductive and electrically insulative. The one or more heater traces are formed of a material that generates heat in the presence of an electrical current. The heating device has a continuous and unbroken structure along the length of the tubing assembly. An encapsulation layer of thermal insulating material is disposed over the tubing assembly and covers the heating device.
Public/Granted literature
- US20200217558A1 Apparatus for Thermal Control of Tubing Assembly and Associated Methods Public/Granted day:2020-07-09
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