Invention Grant
- Patent Title: Biochip having a channel
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Application No.: US17221441Application Date: 2021-04-02
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Publication No.: US11768170B2Publication Date: 2023-09-26
- Inventor: Yi-Shao Liu , Chun-Ren Cheng , Chun-Wen Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G01N27/414
- IPC: G01N27/414 ; G03F7/20 ; G03F7/00 ; B01L3/00 ; G01N33/543

Abstract:
A biochip including a fluidic substrate having an opening extending completely through the fluidic substrate. The biochip further includes a silicon oxide coating on the fluidic substrate. The biochip further includes a plurality of sidewalls on the fluidic substrate, wherein the plurality of sidewalls defines a channel in fluid communication with the opening, the silicon oxide coating is between adjacent sidewalls of the plurality of sidewalls, and each of the plurality of sidewalls comprises polydimethylsiloxane (PDMS). The biochip further includes a detection substrate spaced from the fluidic substrate.
Public/Granted literature
- US20210302367A1 BIOCHIP HAVING A CHANNEL Public/Granted day:2021-09-30
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