- Patent Title: Imprint method, imprint apparatus, and article manufacturing method
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Application No.: US17147849Application Date: 2021-01-13
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Publication No.: US11768433B2Publication Date: 2023-09-26
- Inventor: Kazuhiro Sato , Hiroshi Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: ROSSI, KIMMS & McDOWELL LLP
- Priority: JP 20007017 2020.01.20
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F9/00

Abstract:
Provided is an imprint method of performing an imprint process including a contacting step of bringing a mold into contact with an imprint material on a substrate, a curing step of curing the imprint material, and a separating step of separating the mold from the cured imprint material. The method includes acquiring global alignment information, performing a pre-alignment measurement including moving, based on the acquired global alignment information, a second shot region to a measurement position at which a measurement device performs measurement, and measuring a first relative positional shift between the second shot region and the mold using the measurement device, and moving, based on the global alignment information and the measured first relative positional shift, a first shot region to an imprint position at which the imprint process is performed, and starting the contacting step.
Public/Granted literature
- US20210223688A1 IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2021-07-22
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