Invention Grant
- Patent Title: Imprint apparatus and method of manufacturing article
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Application No.: US16696827Application Date: 2019-11-26
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Publication No.: US11768444B2Publication Date: 2023-09-26
- Inventor: Tetsuji Okada
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP 18228918 2018.12.06
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/20

Abstract:
An imprint apparatus that cures an imprint material on a substrate in a state where a mold is in contact with the imprint material includes a substrate holding unit having a plurality of holding regions that holds the substrate, and a control unit configured to control a pressure in each of the holding regions independently, wherein the control unit controls the pressure based on at least one of shape information and distortion information of the substrate, at least when the imprint material is cured.
Public/Granted literature
- US20200183270A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2020-06-11
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