Invention Grant
- Patent Title: Protective sheet sticking apparatus
-
Application No.: US17656087Application Date: 2022-03-23
-
Publication No.: US11769676B2Publication Date: 2023-09-26
- Inventor: Yoshinori Kakinuma
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP 21051950 2021.03.25
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B32B37/12 ; B32B27/06 ; B32B7/12 ; B32B38/00

Abstract:
A protective sheet sticking apparatus includes a cutting unit that cuts a protective sheet stuck to a wafer along an outer circumference of the wafer while bringing a cutting part of a cutting blade into contact with the outer circumference of the wafer. The cutting unit has a cutting blade support part that supports the cutting blade rotatably in such a manner that the direction of a cutting edge of the cutting part is adjustable from the outside in the radial direction of the wafer to the inside. The cutting blade support part includes a first biasing spring that makes biasing to cause the cutting part to be oriented toward the inside and a second biasing spring that makes biasing to cause the cutting part to be oriented toward the outside in order to prevent the cutting part from being oriented toward the inside by a predetermined angle or larger.
Public/Granted literature
- US20220310421A1 PROTECTIVE SHEET STICKING APPARATUS Public/Granted day:2022-09-29
Information query
IPC分类: