Invention Grant
- Patent Title: Semiconductor substrate, semiconductor package including semiconductor substrate, and test method of semiconductor substrate
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Application No.: US16997377Application Date: 2020-08-19
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Publication No.: US11769700B2Publication Date: 2023-09-26
- Inventor: Bok Gyu Min
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: WILLIAM PARK & ASSOCIATES LTD.
- Priority: KR 20200028051 2020.03.06
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/00 ; H01L23/498

Abstract:
A semiconductor substrate including an upper surface and a lower surface may include a bump pad unit disposed on the upper surface. The semiconductor substrate may also include test pads disposed on the upper surface or the lower surface. The semiconductor substrate may also include traces configured to connect the bump pad unit and the test pads. The bump pad unit includes a main bump pad disposed on the upper surface, and a plurality of side bump pads disposed on the upper surface to be spaced apart from the main bump pad. The traces may connect the main bump pad and the plurality of side bump pads to the test pads in a one-to-one manner.
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