Invention Grant
- Patent Title: Method of manufacturing a semiconductor memory device having capacitor electrodes and a vertical contact plug
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Application No.: US17687257Application Date: 2022-03-04
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Publication No.: US11769721B2Publication Date: 2023-09-26
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: WILLIAM PARK & ASSOCIATES LTD.
- Priority: KR 20190161860 2019.12.06
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H10B43/27 ; H10B43/40

Abstract:
A semiconductor memory device, and a method of manufacturing the same, includes: a gate stack structure including interlayer insulating layers and conductive patterns stacked in a first direction; a channel structure penetrating the gate stack structure; a peripheral contact plug spaced apart from the gate stack structure on a plane intersecting the channel structure, the peripheral contact plug extending in the first direction; and a capacitor spaced apart from the gate stack structure and the peripheral contact plug on the plane, the capacitor having an area wider than an area of the peripheral contact plug.
Public/Granted literature
- US20220189869A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2022-06-16
Information query
IPC分类: