Invention Grant
- Patent Title: Three dimensional integrated circuit with monolithic inter-tier vias (MIV)
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Application No.: US17237443Application Date: 2021-04-22
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Publication No.: US11769723B2Publication Date: 2023-09-26
- Inventor: Shih-Wei Peng , Jiann-Tyng Tzeng , Kam-Tou Sio , Wei-Cheng Lin , Wei-An Lai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Merchant & Gould P.C.
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/528 ; H01L27/02 ; H01L27/06

Abstract:
A monolithic three-dimensional (3D) integrated circuit (IC) device includes a lower tier including a lower tier cell and an upper tier arranged over the lower tier. The upper tier has a first upper tier cell and a second upper tier cell separated by a predetermined lateral space. A monolithic inter-tier via (MIV) extends from the lower tier through the predetermined lateral space, and the MIV has a first end electrically connected to the lower tier cell and a second end electrically connected to the first upper tier cell.
Public/Granted literature
- US20220344258A1 THREE DIMENSIONAL INTEGRATED CIRCUIT WITH MONOLITHIC INTER-TIER VIAS (MIV) Public/Granted day:2022-10-27
Information query
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