Invention Grant
- Patent Title: Integrated circuit device and formation method thereof
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Application No.: US17388145Application Date: 2021-07-29
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Publication No.: US11769725B2Publication Date: 2023-09-26
- Inventor: Mengmeng Wang , Hsin-Pin Huang
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Ladas & Parry LLP
- Priority: CN 2011221558.4 2020.11.05
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L23/522 ; H01L23/532 ; H01L21/768 ; H01L21/311 ; H01L21/02

Abstract:
Disclosed are an integrated circuit device and a formation method thereof. The formation method of an integrated circuit device comprises the following steps: providing a substrate, wherein a first plug and a second plug are disposed inside the substrate; forming a first covering layer covering the substrate; forming, in the first region, a first opening exposing the first plug; forming a first conductive layer in the first opening; forming an isolation layer covering the first conductive layer and the first covering layer; forming, in the first region, a contact hole exposing the first conductive layer and a trench located above the contact hole and connecting with the contact hole, and forming, in the second region, a second opening exposing the second plug; and forming a conductive connection layer in the contact hole, forming a second conductive layer in the trench, and forming a fuse wire in the second opening.
Public/Granted literature
- US20220139829A1 INTEGRATED CIRCUIT DEVICE AND FORMATION METHOD THEREOF Public/Granted day:2022-05-05
Information query
IPC分类: