Invention Grant
- Patent Title: Package structure and manufacturing method thereof
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Application No.: US17739186Application Date: 2022-05-09
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Publication No.: US11769739B2Publication Date: 2023-09-26
- Inventor: Tsung-Fu Tsai , Shih-Ting Lin , Szu-Wei Lu , Chen-Hsuan Tsai , I-Ting Huang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L23/00 ; H01L23/538 ; H01L21/683

Abstract:
A package structure includes a redistribution circuit structure, a wiring substrate, a semiconductor device, an insulating encapsulation, and a reinforcement structure. The redistribution circuit structure has dielectric layers. The wiring substrate is disposed on the redistribution circuit structure. The semiconductor device is disposed on the redistribution circuit structure opposite to the wiring substrate. The insulating encapsulation laterally encapsulates the wiring substrate. The reinforcement structure is partially embedded in the redistribution circuit structure and is partially embedded in the insulating encapsulation. The reinforcement structure includes reinforcement pattern layers and reinforcement vias. The reinforcement pattern layers and the dielectric layers are stacked alternately. The reinforcement vias penetrate through the dielectric layers to connect the reinforcement pattern layers. The reinforcement structure is electrically floating.
Public/Granted literature
- US20220262745A1 PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-08-18
Information query
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