Invention Grant
- Patent Title: Structures of gate contact formation for vertical transistors
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Application No.: US17083026Application Date: 2020-10-28
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Publication No.: US11769809B2Publication Date: 2023-09-26
- Inventor: Sang-Yun Lee
- Applicant: Sang-Yun Lee
- Applicant Address: US OR Hillsboro
- Assignee: BESANG, INC.
- Current Assignee: BESANG, INC.
- Current Assignee Address: US OR Hillsboro
- Agent Jeong Y. Choi
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/792 ; H10B43/27 ; H01L29/423 ; H01L25/18 ; H01L29/40 ; H01L29/06 ; H10B12/00 ; H10B43/35 ; H10B43/40

Abstract:
Structures and methods that facilitate the formation of gate contacts for vertical transistors constructed with semiconductor pillars and spacer-like gates are disclosed. In a first embodiment, a gate contact rests on an extended gate region, a piece of a gate film, patterned at a side of a vertical transistor at the bottom of the gate. In a second embodiment, an extended gate region is patterned on top of one or more vertical transistors, resulting in a modified transistor structure. In a third embodiment, a gate contact rests on a top surface of a gate merged between two closely spaced vertical transistors. Optional methods and the resultant intermediate structures are included in the first two embodiments in order to overcome the related topography and ease the photolithography. The third embodiment includes alternatives for isolating the gate contact from the semiconductor pillars or for isolating the affected semiconductor pillars from the substrate.
Public/Granted literature
- US20220130973A1 Structures of Gate Contact Formation for Vertical Transistors Public/Granted day:2022-04-28
Information query
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