Invention Grant
- Patent Title: Carrier barrier layer for tuning a threshold voltage of a ferroelectric memory device
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Application No.: US17319461Application Date: 2021-05-13
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Publication No.: US11769815B2Publication Date: 2023-09-26
- Inventor: Rainer Yen-Chieh Huang , Hai-Ching Chen , Yu-Ming Lin , Chung-Te Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/51 ; H01L29/66 ; H01L21/28 ; H01L29/78 ; H01L29/417 ; H10B51/20 ; H10B51/30

Abstract:
The present disclosure relates to an integrated circuit (IC) chip including a memory cell with a carrier barrier layer for threshold voltage tuning. The memory cell may, for example, include a gate electrode, a ferroelectric structure, and a semiconductor structure. The semiconductor structure is vertically stacked with the gate electrode and the ferroelectric structure, and the ferroelectric structure is between the gate electrode and the semiconductor structure. A pair of source/drain electrodes is laterally separated and respectively on opposite sides of the gate electrode, and a carrier barrier layer separates the source/drain electrodes from the semiconductor structure.
Public/Granted literature
- US20220285519A1 CARRIER BARRIER LAYER FOR TUNING A THRESHOLD VOLTAGE OF A FERROELECTRIC MEMORY DEVICE Public/Granted day:2022-09-08
Information query
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