Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15922960Application Date: 2018-03-16
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Publication No.: US11770111B2Publication Date: 2023-09-26
- Inventor: Yutaka Kishimoto , Tetsuya Kimura , Masashi Omura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: KEATING & BENNETT, LLP
- Priority: JP 15208802 2015.10.23
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/17 ; H10N30/87 ; H10N30/88 ; H10N30/853 ; H03H9/05 ; H03H9/145 ; H03H9/64

Abstract:
An elastic wave device includes a supporting substrate, an acoustic multilayer film on the supporting substrate, a piezoelectric substrate on the acoustic multilayer film, and an IDT electrode on the piezoelectric substrate. An absolute value of a thermal expansion coefficient of the piezoelectric substrate is larger than an absolute value of a thermal expansion coefficient of the supporting substrate. The acoustic multilayer film includes at least four acoustic impedance layers. The elastic wave device further includes a bonding layer provided at any position in a range of from inside the first acoustic impedance layer from the piezoelectric substrate side towards the supporting substrate side, to an interface between the third acoustic impedance layer and the fourth acoustic impedance layer.
Public/Granted literature
- US20180205361A1 ELASTIC WAVE DEVICE Public/Granted day:2018-07-19
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