Invention Grant
- Patent Title: Semiconductor storage device
-
Application No.: US17194385Application Date: 2021-03-08
-
Publication No.: US11770927B2Publication Date: 2023-09-26
- Inventor: Kenji Watanabe
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 20135031 2020.08.07
- Main IPC: H10B41/27
- IPC: H10B41/27 ; H10B43/27 ; H01L23/522 ; G11C5/06

Abstract:
According to one embodiment, a semiconductor storage device includes: a stacked body in which a plurality of conductive layers are separated from each other and are stacked; a pillar which extends in a stacking direction and includes memory cells to be formed at intersections with at least some of the plurality of conductive layers; an upper insulating layer arranged on the stacked body; a plug which extends in the stacking direction inside the upper insulating layer and is connected to the upper end portion of the pillar; and a spacer insulating layer which surrounds the plug and has a lower dielectric constant than a dielectric constant of the upper insulating layer.
Information query