Invention Grant
- Patent Title: Electrical component
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Application No.: US17294207Application Date: 2019-11-15
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Publication No.: US11770976B2Publication Date: 2023-09-26
- Inventor: Andrew Vella , Peter Mardilovich
- Applicant: Xaar Technology Limited
- Applicant Address: GB Cambridge
- Assignee: Xaar Technology Limited
- Current Assignee: Xaar Technology Limited
- Current Assignee Address: GB Cambridge
- Agency: Honigman LLP
- Agent Eric J. Sosenko; Jonathan P. O'Brien
- Priority: GB 18641 2018.11.15
- International Application: PCT/GB2019/053250 2019.11.15
- International Announcement: WO2020/099892A 2020.05.22
- Date entered country: 2021-05-14
- Main IPC: H10N30/88
- IPC: H10N30/88 ; B41J2/14 ; H10N30/00 ; H10N39/00

Abstract:
The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an electrical component for a microelectromechanical systems device comprising: i) a substrate layer; ii) a plurality of adjacent electrical elements arranged over the substrate layer, where each electrical element is separated from a neighbouring electrical element by an intermediate region, each of the plurality of electrical elements comprising: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a passivation layer, or a laminate of multiple passivation layers, at least partially overlying each of the plurality of electrical elements so as to provide electrical passivation between the first and second electrodes of each of the plurality of electrical elements; wherein the passivation layer, or at least an innermost layer of the laminate of passivation layers which is disposed adjacent each underlying electrical element, is discontinuous over at least one intermediate region between neighbouring electrical elements of the electrical component.
Public/Granted literature
- US20220006001A1 ELECTRICAL COMPONENT Public/Granted day:2022-01-06
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