Etch-resistant doped scavenging carbide electrodes
Abstract:
A resistive switching memory stack, comprised of a bottom electrode, an oxide layer located on the bottom electrode; and a top electrode located on the oxide layer. The top electrode is comprised of a first layer, an intermediate layer located directly on the first layer, and a top layer located on top of the intermediate layer. Wherein the intermediate layer is comprised of a doped carbide active layer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0