Invention Grant
- Patent Title: Etch-resistant doped scavenging carbide electrodes
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Application No.: US17302059Application Date: 2021-04-22
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Publication No.: US11770986B2Publication Date: 2023-09-26
- Inventor: John Rozen , Marinus Hopstaken , Yohei Ogawa , Masanobu Hatanaka , Takashi Ando , Kazuhiro Honda
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , ULVAC, INC.
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agent Samuel A. Waldbaum
- Main IPC: H10N70/00
- IPC: H10N70/00 ; H10B63/00

Abstract:
A resistive switching memory stack, comprised of a bottom electrode, an oxide layer located on the bottom electrode; and a top electrode located on the oxide layer. The top electrode is comprised of a first layer, an intermediate layer located directly on the first layer, and a top layer located on top of the intermediate layer. Wherein the intermediate layer is comprised of a doped carbide active layer.
Public/Granted literature
- US20220344586A1 ETCH-RESISTANT DOPED SCAVENGING CARBIDE ELECTRODES Public/Granted day:2022-10-27
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