Invention Grant
- Patent Title: Polishing apparatus
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Application No.: US16376274Application Date: 2019-04-05
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Publication No.: US11772226B2Publication Date: 2023-10-03
- Inventor: Yuki Inoue , Takamasa Suzuki
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JP 18077495 2018.04.13
- Main IPC: B24B37/005
- IPC: B24B37/005 ; B24B37/04 ; B24B49/04 ; B24B41/06 ; B24B37/30 ; H01L21/306 ; H01L21/304

Abstract:
A polishing apparatus includes a holding table having a holding surface that holds a wafer, a polishing unit in which a polishing pad having an opening at the center of a polishing surface that polishes the wafer is mounted to a spindle and is rotated, a slurry supply unit that supplies slurry to the polishing surface of the polishing pad, and an air supply unit that shuts an upper end of a penetrating path penetrating through the axial center of rotation of the polishing pad and the spindle and supplies air into the penetrating path.
Public/Granted literature
- US20190314950A1 POLISHING APPARATUS Public/Granted day:2019-10-17
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