- Patent Title: Porous polishing pad and process for producing the same all fees
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Application No.: US16385653Application Date: 2019-04-16
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Publication No.: US11772236B2Publication Date: 2023-10-03
- Inventor: Hye Young Heo , Jang Won Seo , Jong Wook Yun , Sunghoon Yun , Jaein Ahn
- Applicant: SK enpulse Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK enpulse Co., Ltd.
- Current Assignee: SK enpulse Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T GROUP LLP
- Priority: KR 20180044465 2018.04.17
- Main IPC: B24D3/34
- IPC: B24D3/34 ; B24B37/24 ; B24B37/22 ; B24D3/28 ; B24D11/00 ; C08J9/32 ; H01L21/304

Abstract:
Embodiments relate to a porous polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors and a process for preparing the same. According to the embodiments, the size and distribution of the plurality of pores contained in the porous polishing pad can be adjusted in light of the volume thereof. Thus, the plurality of pores have an apparent volume-weighted average pore diameter in a specific range, thereby providing a porous polishing pad that is excellent in such physical properties as polishing rate and the like.
Public/Granted literature
- US20190314954A1 POROUS POLISHING PAD AND PROCESS FOR PRODUCING THE SAME Public/Granted day:2019-10-17
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