Invention Grant
- Patent Title: System and method for maintenance of rotation-lift assembly
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Application No.: US16451444Application Date: 2019-06-25
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Publication No.: US11774306B2Publication Date: 2023-10-03
- Inventor: Thomas Ackermann , Torsten Fankhaenel
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01L5/00
- IPC: G01L5/00 ; H01L21/67 ; H01L21/687 ; G01L25/00

Abstract:
Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a system and method for monitoring a rotation-lift assembly of a process chamber. The rotation-lift assembly outputs a torque feedback signal which is processed by a controller to determine if the rotation-lift assembly has a fault or is near failure. The controller determines torque data from the torque feedback signal, compares the torque data to preexisting torque data, and, based on the comparison, issue a notice of a state of the rotation-lift assembly.
Public/Granted literature
- US20190393060A1 SYSTEM AND METHOD FOR MAINTENANCE OF ROTATION-LIFT ASSEMBLY Public/Granted day:2019-12-26
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