Invention Grant
- Patent Title: Methods and apparatus for creating a large area imprint without a seam
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Application No.: US17188684Application Date: 2021-03-01
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Publication No.: US11774851B2Publication Date: 2023-10-03
- Inventor: Kevin Laughton Cunningham , Manivannan Thothadri
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C33/38 ; B29C33/40 ; B29C43/02 ; G03F7/20 ; B29C43/38 ; B82Y40/00 ; G03F7/30

Abstract:
Embodiments of the present disclosure generally relate to imprint lithography, and more particularly to methods and apparatus for creating a large area imprint without a seam. Methods disclosed herein generally include separating the curing time of the features in a stamp or product from the curing time of the seam and the periphery. The seam and periphery can be cured first or the seam and periphery can be cured last. Additionally, the seam curing operations can be performed on the master, on the stamp, or on the final product.
Public/Granted literature
- US20210181625A1 METHODS AND APPARATUS FOR CREATING A LARGE AREA IMPRINT WITHOUT A SEAM Public/Granted day:2021-06-17
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