Invention Grant
- Patent Title: Active reticle carrier for in situ stage correction
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Application No.: US17446035Application Date: 2021-08-26
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Publication No.: US11774866B2Publication Date: 2023-10-03
- Inventor: Avner Safrani , Adi Pahima , Ron Rudoi , Shai Mark
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: HODGSON RUSS LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00
Abstract:
A reticle inspection system and a method of handling a reticle in a reticle inspection system are provided. The reticle inspection system includes an active reticle carrier and an inspection tool. The reticle is disposed on the active reticle carrier, and the inspection tool is configured to determine an orientation of the reticle when the active reticle carrier is disposed on a reticle stage. The active reticle carrier is movable between a loading station and the reticle stage and is configured to rotate the reticle to reorient the reticle based on the orientation of the reticle while the active carrier is disposed on the reticle stage.
Public/Granted literature
- US20220066333A1 ACTIVE RETICLE CARRIER FOR IN SITU STAGE CORRECTION Public/Granted day:2022-03-03
Information query
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