Invention Grant
- Patent Title: Method for manufacturing a one-piece silicon device with flexible blades, in particular for timepieces
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Application No.: US17149112Application Date: 2021-01-14
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Publication No.: US11774914B2Publication Date: 2023-10-03
- Inventor: Pierre Cusin , Alex Gandelhman
- Applicant: Nivarox-FAR S.A.
- Applicant Address: CH Le Locle
- Assignee: Nivarox-FAR S.A.
- Current Assignee: Nivarox-FAR S.A.
- Current Assignee Address: CH Le Locle
- Agency: Sughrue Mion, PLLC
- Priority: EP 156902 2020.02.12
- Main IPC: G04B17/04
- IPC: G04B17/04 ; G04D3/00

Abstract:
A one-piece silicon device with flexible blades (2, 3), in particular for timepieces, for example a pivot with crossed blades, and to a method for manufacturing the device (1). The method includes: forming (21) a one-piece silicon device (1) blank from a wafer of the SOI type, the device (1) including two flexible blades (2, 3), each formed in a different layer of the SOI wafer, the blades (2, 3) being arranged in two different substantially parallel planes, the blades (2, 3) being separated by a clearance (7); growing a first silicon oxide layer on the surface of at least one of the blades (2, 3) bordering the clearance, the first silicon oxide layer being formed from a first sub-layer of silicon of the one or more blades (2, 3); and removing the first silicon oxide layer to increase the clearance (7) between the two blades (2, 3).
Public/Granted literature
- US20210247721A1 METHOD FOR MANUFACTURING A ONE-PIECE SILICON DEVICE WITH FLEXIBLE BLADES, IN PARTICULAR FOR TIMEPIECES Public/Granted day:2021-08-12
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